SHANGHAI FAMOUS TRADE CO.,LTD
SHANGHAI FAMOUS TRADE CO.,LTD
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Product Introduction
Sapphire lift pin is a lift pin made from high-purity single-crystal sapphire, mainly used in semiconductor manufacturing equipment to support and move wafers.Thanks to sapphire’s outstanding high-temperature resistance, chemical stability, and extreme hardness, the sapphire lift pin can maintain stable performance in harsh environments.Using a sapphire lift pin greatly reduces wafer contamination risk, extends equipment lifetime, and improves overall process yield.
Basic Principle
The basic principle of a sapphire lift pin is to accurately lift or lower wafers during processing to ensure proper positioning.Multiple sapphire lift pins usually operate together to prevent wafer warping or damage.Because the sapphire lift pin withstands high temperatures, vacuum, and corrosive environments, it offers much longer service life and higher reliability than conventional materials.
Specifications
| Item | Specification |
|---|---|
| Material | Single Crystal Sapphire |
| Dimensions | Customized |
| Surface Roughness | Ra ≤ 0.02μm |
| Working Temperature | >2000°C |
| Thermal Expansion Coefficient | 5.8 × 10⁻⁶ /°C |
| Flexural Strength | ≥ 400 MPa |
| Transparency | High transmittance in visible range |
| Corrosion Resistance | Excellent |
| Tip Shape | Flat,Round,Tapered |
| Mounting | Mechanical or Threaded |
Applications
Sapphire lift pins are widely used in equipment for etching (Etch), chemical vapor deposition (CVD), physical vapor deposition (PVD), and atomic layer deposition (ALD).During wafer loading, transfer, and cooling, sapphire lift pins play a crucial role in supporting and positioning.Especially in optoelectronic devices, MEMS production, and power semiconductor manufacturing, the sapphire lift pin has become a core component.
Q&A
Q1: Why choose a sapphire lift pin instead of ceramic or metal?
A1: The sapphire lift pin offers higher chemical resistance and thermal stability, capable of long-term operation in corrosive gases and high-temperature environments.
Q2: Does the sapphire lift pin generate particles during use?
A2: Due to its extremely smooth surface, the sapphire lift pin has an extremely low risk of particle generation, making it ideal for ultra-clean processes.
Q3: Do different machines require custom sapphire lift pins?
A3: Yes, depending on the machine model and process requirements, the sapphire lift pin often needs to be customized in size, shape, and connection interface.
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