SHANGHAI FAMOUS TRADE CO.,LTD
SHANGHAI FAMOUS TRADE CO.,LTD
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Sapphire lift pin for semiconductor Ceramic lift pins High purity sapphire pins
Abstract of Sapphire lift pin
Sapphire lift pins are precision-engineered components widely used in
semiconductor processing equipment, particularly in wafer handling, epitaxial growth, and deposition systems such as MOCVD (Metal-Organic Chemical Vapor Deposition), PECVD (Plasma Enhanced Chemical Vapor Deposition), and other high-temperature, vacuum, or corrosive environments. Fabricated from single-crystal aluminum oxide (Al₂O₃), also known as synthetic sapphire, these lift pins are valued for their exceptional hardness, thermal stability, chemical resistance, and durability.
Properties of Sapphire lift pin
| Property | Value |
| Hardness | 9 on Mohs scale (second only to diamond) |
| Melting Point | >2,000°C |
| Thermal Conductivity | ~35 W/m·K |
| Thermal Expansion | ~5.3 × 10⁻⁶/K |
| Young's Modulus | ~345 GPa |
| Chemical Resistance | Inert to most acids, alkalis, and corrosive gases |
| Electrical | Excellent insulator |
| Optical Transparency | Transparent from UV to IR (150 nm – 5.5 μm) |
Sapphire lift pins are often custom-designed
Sapphire maintains its mechanical strength at temperatures exceeding 1,500°C, making it well-suited for epitaxial reactors and deposition chambers where other materials may warp, oxidize, or degrade.
Sapphire is chemically inert in reactive and corrosive gases such as H₂, NH₃, and HF, ensuring long-term performance in CVD and etching environments.
The high surface hardness resists wear and scratching from wafer contact and mechanical actuation. This minimizes particle generation and contamination.
Sapphire can be machined to tight tolerances (±1 μm), ensuring consistent wafer lift height, positioning accuracy, and alignment reliability.
Unlike coated ceramics or metals that may flake or outgas under thermal cycling, sapphire does not produce particulates, which is critical for cleanroom and ultra-pure process environments.
Sapphire’s wear resistance and stability under extreme conditions contribute to lower maintenance frequency and longer equipment uptime.
Physical image of sapphire lift pin
Sapphire lift pins are employed in a range of semiconductor and advanced material processes where wafers need to be precisely handled during fabrication. Key applications include:
GaN, GaAs, and InP-based compound semiconductor growth
LED and laser diode production
Sapphire wafers and epi-ready substrates
Wafer transfer during plasma-based thin film deposition
Used in microelectronics, solar cells, MEMS, and photonics
High-temperature annealing, oxidation, or diffusion steps
Mechanical systems that temporarily support or manipulate wafers
Where chemical resistance is critical during wafer pre-cleaning or stripping
Q&A
Q:What key factors should be considered when purchasing sapphire pins?
A: Application Scenario
Dimensions and Specifications
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