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SOI Wafer Silicon-on-Insulator Wafer 4inch 5inch 6inch 8inch (100) (111) P Type N Type
SOI wafer refers to a thin layer of silicon single crystal overlaid on an insulator made of silicon dioxide or glass (hence the name "silicon on insulation lining", often referred to as SOI for short). Transistors built on a thin layer of SOI can operate faster and consume less power than those built on a simple silicon chip. In semiconductor manufacturing, silicon-on-insulator (SOI) technology is the fabrication of silicon semiconductor devices in a layered silicon–insulator–silicon substrate, to reduce parasitic capacitance within the device, thereby improving performance. SOI-based devices differ from conventional silicon-built devices in that the silicon junction is above an electrical insulator, typically silicon dioxide or sapphire (these types of devices are called silicon on sapphire, or SOS). The choice of insulator depends largely on the intended application, with sapphire being used for high-performance radio frequency (RF) and radiation-sensitive applications, and silicon dioxide for diminished short-channel effects in other microelectronics devices. The insulating layer and topmost silicon layer also vary widely depending on the application.
Diameter | 4" | 5" | 6" | 8" | |
Device Layer | Dopant | Boron, Phos, Arsenic, Antimony, Undoped | |||
Orientation | <100>, <111> | ||||
Type | SIMOX, BESOI, Simbond, Smart-cut | ||||
Resistivity | 0.001-20000 Ohm-cm | ||||
Thickness (um) | >1.5 | ||||
TTV | <2um | ||||
BOX Layer | Thickness (um) | 0.2-4.0um | |||
Uniformity | <5% | ||||
Substrate | Orientation | <100>, <111> | |||
Type/Dopant | P Type/Boron , N Type/Phos, N Type/As, N Type/Sb | ||||
Thickness (um) | 200-1100 | ||||
Resistivity | 0.001-20000 Ohm-cm | ||||
Surface Finished | P/P, P/E | ||||
Particle | <10@.0.3um |
Our customized SoL solutions are used in the following fields:
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1.Q: What is the dielectric constant of silicon on insulators?
A: The dielectric constant for commonly used silicon materials are: Silicon dioxide (SiO2) - dielectric constant = 3.9. Silicon nitride (SiNx) - dielectric constant = 7.5. Pure silicon (Si) - dielectric constant = 11.7
2.Q:What are the advantages of SOI wafers?
A: SOI wafers have greater resistance to radiation, making them less prone to soft errors. The higher density also increases the yield, thus improving wafer utilization. Additional advantages of SOI wafers include a reduced dependency on temperature and fewer antenna issues.
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