SHANGHAI FAMOUS TRADE CO.,LTD
SHANGHAI FAMOUS TRADE CO.,LTD
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silicon carbide ceramic tray Used to support materials semiconductor wafers Excellent corrosion resistance.
silicon carbide ceramic tray‘s short brief
Silicon carbide (SiC) ceramic trays are specialized components designed to support semiconductor wafers during fabrication processes. Renowned for their excellent corrosion resistance, these trays can withstand aggressive chemical environments, making them ideal for use in semiconductor manufacturing. Their high thermal stability and mechanical strength ensure reliable performance in high-temperature applications, providing a stable platform for critical processes such as epitaxy, diffusion, and oxidation. The versatility and durability of SiC ceramic trays make them essential in various advanced manufacturing environments, enhancing the efficiency and quality of production.
silicon carbide ceramic tray‘s data chart
| Manufacturer | ASUZAC | ASUZAC | Company A | Company B | Company C | |
|---|---|---|---|---|---|---|
| Product name | ASiC | SiC3N | ||||
| Manufacturing method | Sintering by normal pressure | Sintering by normal pressure | Hot Pressing | CVD | Si-SiC | |
| Density | g・cm3 | 3.15 | 3.18 | 3.15 | 3.21 | 3.05 |
| Vicker's hardness | 28 | 28 | 22 | 26 | ─ | |
| Flexual strength | Mpa | 410 | 450 | 600 | 590 | 220 |
| Elasticity | Gpa | 430 | 430 | 390 | 450 | 280 |
| Fracture toughness | Mpa/cm^0.5 | 2.5 | 2.5 | 4.4 | ─ | ─ |
| Thermal expansion | E-6/K | 4.1 | 4.1 | 4.3 | 4 | 4.8 |
| Thermal conductivity | W/m•K | 170 | 140 | 230 | 250 | 225 |
silicon carbide ceramic tray‘s properties
High Thermal Stability:
Can withstand extreme temperatures, making them suitable for high-temperature applications such as sintering and semiconductor processing.
Mechanical Strength:
Exhibits exceptional strength and hardness, providing durability and the ability to support heavy loads without deformation or cracking.
Chemical Resistance:
Highly resistant to corrosion and chemical attack, allowing them to be used in aggressive environments, particularly in chemical processing and manufacturing.
Thermal Conductivity:
Facilitates efficient heat distribution, helping maintain consistent processing temperatures.
Low Thermal Expansion:
Features a low coefficient of thermal expansion, ensuring dimensional stability and reducing the risk of warping or cracking under varying temperature conditions.
Lightweight:
Despite their strength and durability, SiC ceramic trays are relatively lightweight, making them easier to handle and transport during manufacturing processes.
Electrical Insulation:
Provides excellent electrical insulation properties, making them suitable for electronic applications where minimizing electrical conductivity is crucial.
CVD Coating Options:
Many SiC ceramic trays come with a Chemical Vapor Deposition (CVD) coating, enhancing wear resistance and providing additional protection against thermal shock.
Customizability:
Can be manufactured in various sizes and shapes, allowing for customization to meet specific application requirements.
silicon carbide ceramic tray‘s applications
Semiconductor Manufacturing:
SiC ceramic trays are essential for supporting silicon wafers during fabrication processes, including epitaxy, diffusion, and oxidation, ensuring high-quality results.
High-Temperature Sintering:
These trays are used in the production of advanced ceramics, providing a stable platform that can withstand extreme temperatures required in sintering processes.
Chemical Processing:
Due to their excellent chemical resistance, SiC trays are ideal for handling aggressive chemicals in both laboratory and industrial environments, often utilized in reaction vessels and distillation columns.
Electronics Production:
SiC trays serve as substrates in the manufacturing of electronic devices, where their insulating properties and thermal conductivity enhance overall performance and reliability.
Optical Component Manufacturing:
Used in the fabrication of optical components, SiC trays support materials that require precise temperature control, contributing to high-quality optical performance.
Aerospace and Automotive Applications:
SiC ceramic trays are employed in the aerospace and automotive industries for their lightweight and high-strength characteristics, particularly in components that require effective thermal management and corrosion resistance.
Research and Development:
In R&D settings, these trays are utilized for experimental setups involving high temperatures or corrosive materials, providing a robust platform for innovative materials testing.
Medical Device Manufacturing:
Silicon carbide trays are utilized in the production of medical devices, offering sterilization capabilities and chemical resistance in processing environments.
silicon carbide ceramic tray‘s photos
