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N-type SiC on Si Compound Wafer 6inch 150mm SiC type 4H-N Si type N or P
N-type SiC on Si Compound Wafer abstract
N-type silicon carbide (SiC) on silicon (Si) compound wafers have garnered significant attention due to their promising applications in high-power and high-frequency electronic devices. This study presents the fabrication and characterization of N-type SiC on Si compound wafers, emphasizing their structural, electrical, and thermal properties. Utilizing chemical vapor deposition (CVD), we successfully grew a high-quality N-type SiC layer on a Si substrate, ensuring minimal lattice mismatch and defects. The structural integrity of the compound wafer was confirmed through X-ray diffraction (XRD) and transmission electron microscopy (TEM) analyses, revealing a uniform SiC layer with excellent crystallinity. Electrical measurements demonstrated superior carrier mobility and reduced on-resistance, making these wafers ideal for next-generation power electronics. Additionally, the thermal conductivity was enhanced compared to traditional Si wafers, contributing to better heat dissipation in high-power applications. The results suggest that N-type SiC on Si compound wafers hold great potential for integrating high-performance SiC-based devices with the well-established silicon technology platform.
Specifications and Schematic Diagram for N-type SiC on Si Compound Wafer
Item | Specification | Item | Specification |
---|---|---|---|
Diameter | 150 ± 0.2 mm | Si Orientation | <111>/<100>/<110> |
SiC Type | 4H | Si Type | P/N |
SiC Resistivity | 0.015–0.025 Ω·cm | Flat length | 47.5 ± 1.5 mm |
Transfer SiC layer Thickness | ≥0.1 μm | Edge Chip, Scratch, Crack (visual inspection) | None |
Void | ≤5 ea/wafer (2 mm < D < 0.5 mm) | TTV | ≤5 μm |
Front roughness | Ra ≤ 0.2 nm (5 μm × 5 μm) | Thickness | 500/625/675 ± 25 μm |
N-type SiC on Si Compound Wafer photos
N-type SiC on Si Compound Wafer applications
N-type SiC on Si compound wafers have a variety of applications due to their unique combination of properties from both silicon carbide (SiC) and silicon (Si). These applications primarily focus on high-power, high-temperature, and high-frequency electronic devices. Some key applications include:
Power Electronics:
Automotive Electronics:
RF and Microwave Devices:
Aerospace and Defense:
Industrial Electronics:
Medical Devices:
In summary, N-type SiC on Si compound wafers are versatile and essential in applications that demand high efficiency, reliability, and performance in challenging environments, making them a key material in advancing modern electronic technologies.